摘要
本文就近几年在ＭＥＭＳ（ＭｉｃｒｏＥｌｅｃｔｒｏＭｅｃｈａｎｉｃａｌＳｙｓｔｅｍｓ）基本力学量测量技术的最新发展及其特点、意义、进行了较全面的综述。内容包括：ＭＥＭＳ所用材料的基本力学参数测量（如Ｅ、Ｇ、μ），材料的摩擦与摩损的测量，ＭＥＭＳ结构内应力、应变的测量，结构的动态参数和机构运动速度的测量等，为ＭＥＭＳ的研究提供有益的参考。
The new developments in measuring techniques for the essential mechanical characteristics of MEMS and its components are reviewed, where the material properties(such as E,G,μ), the friction and wear of materials,the strain and stress in MEMS components and the dynamic parameters and moving velocity of MEMS mechanisms are mainly concerned.
出处
《实验力学》
CSCD
北大核心
1997年第4期487-499,共13页
Journal of Experimental Mechanics
基金
国家自然科学基金
关键词
微机电系统
MEMS
力学量检测
microelectromechanical systems, measurement of mechanical characteristics.
