摘要
利用能量为 1.7MeV、注量分别为 10 13 ～ 10 15/cm2 的电子辐照VO2 薄膜 ,采用XPS、XRD等测试手段对电子辐照前后的样品进行分析 ,并采用光透射性能和电学性能测试研究了电子辐照对样品相变过程中光电性能的影响。结果表明电子辐照在VO2 薄膜中出现变价效应 ,产生新的X射线衍射峰 ,带来薄膜化学成分的变化。电子辐照在样品中产生的这些变化对VO2
VO 2 thin films have been irradiated by electron beam with flux from 10 13 /cm 2 to 10 15 /cm 2 and energy of 1.7MeV. Structure and valence of before and after irradiation samples have been studied by X ray diffraction and X ray photoelectron spectroscopy. And phase transition properties of samples have been characterized by optical and electrical analysis methods. The results show that the phenomena of valence variation of V ion, the new peak of XRD and the change of component have been presented in irradiated samples. The electrical and optical properties during phase transition process have been affected by electron irradiation.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2001年第5期525-528,共4页
Journal of Functional Materials
关键词
结构
相变性能
电子辐照
热致相变
二氧化钡薄膜
VO 2 thin film
structure
phase transition properties
electron irradiation
