摘要
根据差压式气动测量原理,设计了一种微纳米级气动传感器,并通过硬件电路设计、软件系统开发研制了智能型非接触式气动测微仪。通过软件调零及误差补偿技术,达到了气动传感器非接触线性测量的目的。结果表明:气动传感器分辨力0.2μm,线性度2%,回程误差0.7%,灵敏度0.65 kPa/μm;仪器在0～80μm的测量范围内最大示值误差为0.3 m,回程误差为0.25μm.该智能型测微仪在一定程度上能应用在高精度微纳米检测场合中。
A pneumatic sensor with micro-nano level was designed, which is based on the working principle of pneumatic path of differential pressure type. Further more, the intelligent pneumatic micro-displacement measuring instrument was developed by designing hardware electric circuit and programming software system. With the technology of software setting zero and error compensation, this pneumatic sensor can realize the purpose of non-contact linear gauging. The results indicate that the sensor resolution is 0.2 μm,the linearity is 2% ,hysteresis error is 0.7% ,the sensitivity is 0.65 kPa/ μm. The measuring range of instrument is from 0 to 80 μm with 0.3 μm maximum indication error and 0.25 μm hysteresis error. This intelligent micro-displacement measuring instrument can be applied in high-accuracy micro-nano inspecting occasions on some level.
出处
《仪表技术与传感器》
CSCD
北大核心
2013年第9期28-31,共4页
Instrument Technique and Sensor
关键词
气动测量
差压式气动传感器
微纳米级
气动测微仪
pneumatic gauging
pneumatic sensor with differential pressure type
micro-nano level
pneumatic micro-displacementmeasuring instrument
