摘要
提出了一种全新的nm级微位移测量方法,改进了传统光杠杆测微位移的原理,研究开发了一种激光微位移测量系统。该方法可以将微位移量放大102量级以上,测量系统的理论分辨率为4nm、实测分辨率小于10nm,实验验证了该系统的可行性和可靠性。该系统适用范围广、灵敏度高、重复性好和结构简单,便于构成微电机系统(MEMS),实现系统微型化及自动化。
A novel optical method and a nanometer laser system are introduced for micro displacement measurement, The improved method is based on the principle of optical lever. By using this method,the micro displacement is magnified 102 times. The theoretical resolving power of this system is 4 nm,and the practical resolving power is less then 10 nm,which is analyzed theoretically and proved by the experiments. The experiment results show that this system is highly accurate and sensitive even in air. This automatic measurer can be used in lots of conditions and be modified into micro-electromechanical system （MEMS） with the advantage of simple configuration.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2006年第8期969-973,共5页
Journal of Optoelectronics·Laser
基金
浙江大学微系统科学中心资助.
关键词
光杠杆
纳米检测
位置敏感探测器(PSD)
微位移
optical lever
nanometer displacement measurement
position sensitive detector（PSD）
micro displacement
