摘要
介绍了一种基于光杠杆原理的光学微位移测量系统。该系统的理论分辨力为4nm,实验测得系统分辨力小于10nm。经过实验,验证了该系统的可行性。实验结果表明,该装置灵敏度及重复性好,结构简单,便于构成微电子机械系统——M EM S(m icro electrom echan ical system s),实现系统微型化及自动化。
A nanometer system for displacement measurement is described, which is based on the principle of optical lever. This system＇s resolving power is less than 10 nm, which is analyzed from the theory and proved by the experiment. The experiment result shows that this system has a high accuracy and repeatability. And with the advantage of simple configuration, so this system can be modified into MEMS （micro electro mechanical systems）.
出处
《光学仪器》
2006年第2期61-65,共5页
Optical Instruments
关键词
光杠杆
纳米检测
PSD
MEMS
optical lever
nanometer displacement measurement
PSD
MEMS
