摘要
针对微型机电系统发展过程中存在的问题 ,论述了开展微型机械设计基础研究的意义和必要性 ,并且总结出微型机械研究中关于微机械设计基础研究的范畴和特点 。
Based on the existing problems in the development of MEMS,the needs of study on the fundamental design issues are discussed The requirements and characteristics of subject branches in the fundamental design of MEMS are summarized The research directions that must be addressed at the present are proposed as well
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2000年第7期39-42,共4页
Journal of Mechanical Engineering
关键词
微型机械
微机构学
微材料力学
微摩擦学
Micromachine Micromechanisms Micro mechanics of materials Microtribology