摘要
随着微型机械的发展,尤其是微摩擦学研究的进展,微摩擦测试技术显得极为重要。综述了国内外微摩擦测试技术的研究进展和现状,介绍了基于应变仪、压力传感器、电磁微型马达、硅微机械结构、浮力、光学检测等原理的微摩擦测试仪,分析了它们的工作原理和特点。
With the progress of MEMS, especially micro-tribology, it is very important of micro-tribology measuring technology. The progress and actuality of researching micro-tribology measuring technology was summed up, and some micro-tribology testing apparatus based on strain gauge, pressure sensor, electromagnetism micro-motor, silicon micro-machine, buoyant force, optical measurement were presented, and their work principles and characteristics were analyzed.
出处
《润滑与密封》
CAS
CSCD
北大核心
2006年第7期178-181,共4页
Lubrication Engineering
基金
国家自然科学基金资助项目(50275071
50545035)
江西省工业攻关项目
关键词
微摩擦
测试技术
研究进展
miero-tribology
measuring technology
research development
