摘要
分析了微型机电系统的特点、主要科学技术问题、应用和市场。预计到 2 0 0 3年微小系统的市场约为 40 0亿美元 ,是商用航空业的一半。简介了我国的研究情况。国际上微型机电系统技术刚走向全面发展 。
Microelectromechanical Systems(MEMS) is a burgeoning hi gh technology.It faces a prospective future with the broad application in the fi eld of agriculture,communication,traffic,medical treatment,environment,aerospace and aviation,defence,etc..The development,characteristics,key technologies,appl ication and market of MEMS are analyzed and discussed in this paper.It is said t hat the market of microsystem will come to about 40 billion dollars in 2003,whic h is as half as the market of civil aviation.The situation of MEMS research in C hina is also introduced in this paper.The MEMS is just on the way of overall dev elopment,therefore,it is the timeliness for us to develop MEMS is China.
出处
《中国机械工程》
CAS
CSCD
北大核心
2000年第1期163-168,7,共6页
China Mechanical Engineering
基金
国家自然科学基金资助重大项目! ( 5 92 3 5 110 )
关键词
微型机电系统
微传感器
微执行器
微米/纳米技术
microelectromechanical systems(MEMS) micro sensors micro actuators micro/nano technology
