摘要
微机电系统(Micro Electro Mechanical Systems,MEMS)涉及多个物理域,多物理域的耦合加大了设计建模的难度。多学科设计优化方法(Multidisciplinary Design Optimization,MDO)是专门针对复杂系统的综合设计优化方法,在处理系统间的相互耦合问题上有着技术和方法上的优势。提出将多学科设计优化方法应用于MEMS的多物理域耦合设计,并对相应的多物理域耦合建模方法作出了分析研究。
Micro Electro Mechanical System （MEMS） deals with many physics region; the coupling of multi-physics region increases the difficulty of design modeling. Multi-disciplinary Design Optimization （MDO） is a special comprehensive methodology of design optimization in accordance with complicated systems; it has the advantages of techniques and methodology while dealing with problems of mutual coupling between systems, Let the MDO methodology be applied to the coupling design of muhi-physics region of MEMS has been put forward, and an analytical study was made on the modeling method of the corresponding coupling of multi-physics region.
出处
《机械设计》
CSCD
北大核心
2006年第11期10-12,共3页
Journal of Machine Design
关键词
微机电系统
多学科设计优化
耦合
micro electro mechanical system （MEMS）
muhidiscipline design optimization
coupling
