摘要
详细介绍了纳米测量系统的组成 :纳米传感技术、纳米扫描测试系统、信息处理与图像分析技术 ;综述了纳米测量技术国内外现状 ;在此基础上 ,提出了纳米测量需解决的关键技术及今后的发展方向。
Nanon measurement system composed of nanon sensing technique,nanon scanning measurement and control system,information processing and image analysis technique is introduced in detail.State of the arts of nanon measurement technique at home and abroad are summarized.Based on those,the key techniques and development trends of nanon measurement are proposed.
出处
《激光杂志》
CAS
CSCD
北大核心
2000年第2期2-3,6,共3页
Laser Journal
基金
国家自然科学基金
关键词
纳米测量
扫描隧道显微镜
激光干涉仪
nanon measurement,scanning tunneling microscope,laser interferometer
