摘要
激光双焦干涉表面微观轮廓仪在测量原理上首次实现完全共路干涉和无需参考面的突破，为在加工现场对超光滑表面的实时检测提供了可能。本文论述了一种产品化的双焦干涉平面微观轮廓仪的测试原理和控制过程，着重介绍其软件的功能结构和关键算法，最后给出了和进口Ｗｙｋｏ轮廓仪比对的结果。
Laser Double-focus Interference Profilometer first makes a breakthrough in totally common path interference without reference surface. The principle and control processo f a Double-focus Interference Planar Profilometer is introduced in this article,paying moreattention to its software structure and the key algorithm. Finally we give the results of thecomparisom with Wyko profilometer.
出处
《光学仪器》
1998年第3期18-23,共6页
Optical Instruments
关键词
偏振移相
平面微观轮廓仪
双焦干涉
Polarization phase shift. Electronic Common Mode Rejection, Interface between Human and machine Comparison Repetibility
