摘要
本文论述共路剪切扫描干涉仪原理,提出两种共路剪切干涉系统及一种新的条纹扫描方法。该干涉仪能有效地对光学表面、透镜进行精密检测,特别适用于光学非球面的检测,电适用于在没有严格环境控制的加工现场,对光学元件进行实时检测。
The operation principle of common path shearing fringe scanninginterferometer is described.Two types of common interference systems and anew phase modulation method are introduced.This interferometer is an effe-ctive instrument to measure optical surfaces and lenses especially for mea-suring asphrical.The system can be used in the optical shop field testing.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1989年第3期241-247,共7页
Chinese Journal of Scientific Instrument
