摘要
针对硅片双端面磨削工作台与砂轮干涉的问题,设计了一种新的工作台,不仅可以消除工作台与砂轮的干涉,还可以实现旋转的功能,为了验证工作台结构的可行性,采用ADAMS仿真软件对机构进行了运动学仿真,得到了工作台在工作过程中的角速度曲线,并对影响工作台平稳性的参数进行了对比研究,结果表明,并非驱动角速度越低系统越稳定,而是系统参数之间存在最优的匹配值。
This paper designed a new table to solve the interference problems between work bench and grinding wheel in double side grinding of silicon wafers. It does not only can eliminate the table and grinding wheel intervention, but also have the rotate function. Using simulation software ADAMS to verify the table structure feasibility, generated the angular velocity curve of table in process, and the parameters affect the stationary table were compared, results showed that the system does not more stable the lower the anaular velocitv, b,,t the ,~vstam n^r~m^ttlr~ mnl＇r.h k^t tlo,~ r,~＋;moi ,,o1,,~
出处
《煤矿机械》
北大核心
2012年第4期34-35,共2页
Coal Mine Machinery
关键词
双端面磨削
工作台
运动学仿真
double side grinding
table
kinematics simulation
