摘要
数控多线切割技术实现了集成电路制造技术的跨越式发展,已成为数控机床制造技术及集成电路制造技术的重要标志,引起了发达国家的广泛重视。论述了数控多线切割技术的特征;介绍了我国自行研制的XQ120和XQ300系列数控多线切割机床并与国外产品进行比较;指出了开发大型数控多线切割机床的技术难点;阐述了我国研发具有自主知识产权的大型数控多线切割机床设备的必要性。
Numerical control multi-wire saw technology gives the integrate circuit manufacturing technology a great development, which becomes a important sign of numerical control machine manufactur- ing technology and IC manufacturing technology, it gains the attention of the developed countries. This article discussed the characteristics of numerical control multi-wire saw technology; introduced XQ120 and XQ300 series multi-wire saws which are developed by our country and compared with overseas products; pointed out the technical difficulties of developing large-size numerical control multi-wire saw; and made the conclusion that developing the large-size numerical control multi-wire saw by our country which owns the intellectual property rights is very necessary.
出处
《电子工业专用设备》
2007年第11期1-4,共4页
Equipment for Electronic Products Manufacturing
关键词
多线切割
半导体加工
集成电路制造技术
数控机床
张力控制
Multi-wire saw
Semiconductor process
Integrate circuit manufacturing technology
Nu-merical control machine
Tension control
