摘要
蓝宝石(α-Al2O3)晶体因其具有硬度高、熔点高等优良特性而在国防、航空航天、工业以及生活领域都得到广泛应用,蓝宝石晶片加工质量对其应用有着重要的影响。文章总结了蓝宝石晶片加工表面损伤常用的检测方法,并比较分析了这些检测方法的优缺点,提出了适用于加工需要的蓝宝石晶片表面损伤快速检测方案。
Sapphire crystal is used extensively for national defense,industry,the field of life and so on because of its excellent characters such as high hardness and melting point.The Grinded sapphire substrate quality has important influence on its application.In this paper,the usually methods of surface damage inspection for grinded sapphire substrate are introduced.Their advantages and disadvantages are also compared and analyzed.Then the rapid detection projects which are suitable for sapphire surface damage are put forward.
出处
《超硬材料工程》
CAS
2011年第5期51-55,共5页
Superhard Material Engineering
基金
国家自然科学基金重点项目(50535040)资助
关键词
蓝宝石晶片
表面损伤
检测
sapphire substrate
surface damage
inspection
