摘要
提出了一种基于瑞利散射定律及米氏理论（Ｒａｙｌｅｉｇｈ＆Ｍｉｅｔｈｅｏｒｙ）的、在垂直于入射光方向接收散射光以极大提高衬度来检测材料内部微／纳米级体缺陷的无损检测新途径，叙述了有关的理论基础，进行了系统的计算机仿真与实验研究，验证了理论的正确性及方案的可行性，说明利用光散射测量微／纳米级体缺陷是可行的。
Demands for ultra high precision non destructive detection of micro bulk defects in materials have manifested as microelectronics and micro electro mechanical system (MEMS) rapidly develops. But at the same time, although many high precision non destructive defects detection methods exist now, they still can′t meet the requirements at all. In this paper, after having established a mathematical modeling of detecting micro bulk defects by Rayleigh & Mie theory, a novel way, which collects scattered light in the direction vertical to the incident laser and can detect micro bulk defects in materials, is proposed. In order to prove the rightness of the modeling and technique, simulation experiments on microsize diamond particles are implemented and the scattered graph collected in the direction vertical to the incident light is processed. Satisfactory result is achieved which demonstrates that the scattering modeling and technique are correct and that the LST non destructive detection of micro bulk defects is feasible.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1997年第6期508-512,共5页
Chinese Journal of Lasers
基金
国家自然科学基金
霍英东基金
关键词
微米级
纳米级
体缺陷
激光
无损检测
光检测
Rayleigh & Mie theory, scatter, micro/nano bulk defect, non destructive detection
