摘要
阐述了蓝宝石晶片质量检测的重要性，根据蓝宝石晶片国家标准和国际质量保证体系，结合目前蓝宝石晶片生产和科研的实际情况，提出了蓝宝石晶片质量检测体系，包括蓝宝石晶片质量检测内容、检测方法和检测设备，通过试验研究，该质量检测体系能够满足光电子领域所需的蓝宝石晶片生产要求。
The significance of quality inspection for sapphire wafer is presented. The system of quality inspection for sapphire wafer is brought forward, according to international and Chinese standards of sapphire wafer. The content, method and equipment of quality inspection for sapphire wafer material, shape, surface and cleaning are discussed. This system of quality inspection can meet the need of manufacture of sapphire wafer by experiment.
出处
《应用科技》
CAS
2005年第11期21-24,共4页
Applied Science and Technology
基金
江苏省教育厅自然科学研究指导计划资助项目(04KJD430213)国家863计划资助项目(2002AA311010)
关键词
蓝宝石晶片
质量检测
检测方法
质量控制
sapphire wafer
quality inspection
method of inspecting
quality control
