摘要
本文根据超晶格结构的台阶模型,利用X射线衍射的运动学模型,导出了超晶格的X射线衍射峰的相对光强比.利用X射线双晶衍射方法测定了MBE[(Al_xGa_(1-x)As)_1(GaAs)_m]./GaAs(001)一维超晶格的衍射迴摆曲线,除超晶格的主衍射峰外,还观察到一级和二级卫星峰.由这些衍射峰之间的角距离和相对光强比,计算出了超晶格的结构参数,其中包括周期D、垒宽L_B、量子阱宽度L_Z和Al含量x值.
Based on step structive model,the relative intensive rate of X-ray diffraction peaks ofsuperlattice has been derived.The roching curves of one-dimensional MBE [(Al_xGa_(1-x)As)_1(GaAs)_m]_a/GaAs (001) superlattice has been meaaured by the X-ray double-crystal diffracte-merry.The superlattice period D.Al_xGa_(1-x)As layer thichness L_(?) ,Al concentration x and GaAslayer thichness L_(?) have been obtained from the angle separations △θ and relative intensities be-tween these satellite peaks around the main reflection peak appeared in the superlattice rocking(?)ves.
关键词
超晶格
X射线
双晶衍射
参数
MBE
Superlattice
X-ray double-crystal diffraction
Rocking curve
Satellite peak
Structure parameter
