摘要
用微波等离子体化学气相沉积设备，在金属钼衬底上沉积出了表面存在大量微尖的金刚石镶嵌非晶碳膜，分别用扫描电子显微镜（ＳＥＭ）、金相显微镜和Ｘ射线衍射谱（ＸＲＤ）及Ｒａｍ ａｎ谱对样品进行了分析测试，并研究了各样品的场致电子发射特性。结果发现：在笔者的实验范围内，金刚石薄膜表面微尖对场致电子发射具有增强作用，且薄膜表面微尖数目越多，场发射电流密度和发射点密度越高，场发射的发射阈值越低。
Diamond carbon films with micro tips surface morphologies were obtained,which were deposited on pretreated molybdenum by microwave plasma assisted chemical vapor deposition system. The films were characterized by X ray diffraction(XRD),Raman spectrum,optical microscopy and scanning electron microscopy(SEM). The result of experiment indicates that the obtained diamond car bon films with micro tips surface morphologies consist of many diamond nuclei. By investigating electron emission of the diamond carbon films, we found that the more micro tips numbers on diamond carbon thin films surface there are, the more efficient the electron emission is. A field enhancement model and injection mechanism have been developed to explain the low turn on field and high emission current.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1999年第3期280-284,共5页
Research & Progress of SSE
基金
"863"计划新材料领域资助
关键词
场致电子发射
负电子亲和势
金刚石薄膜
Diamond carbon Thin Film Field Electron Emission Negative Electron Affinity
