摘要
用微波等离子体化学气相沉积设备，在经过不同研磨预处理的金属钼衬底上沉积出了表面形貌有较大差异的金刚石镶嵌非晶碳膜，分别用扫描电子显微镜（ＳＥＭ）、金相显微镜和Ｘ射线衍射谱（ＸＲＤ）以及Ｒａｍａｎ光谱对样品进行了分析测试．研究了各样品的场致电子发射特性，结果发现薄膜表面由大量镶嵌有金刚石小晶粒的非晶碳球组成，在我们的实验范围内，薄膜表面非晶碳球尺寸越小。
Diamond films with various surface morphologies were obtained, which were deposited on pretreated molybdenum by microwave plasma assisted chemical vapor deposition system. The films were characterised by X ray diffraction (XRD), Raman spectrum, optical microscopy and scanning electron microscopy(SEM). The result of expe riment indicates that diamond films with ball like graphitic surface morohologis, which consisted of diamond nulei, were obtained. By investigating electron emission of the diamond amorphous carbon films, we found that the lower of the size of the ball like graphitics in diamond amorphous carbon thin films the most efficient of electron emission.
出处
《发光学报》
EI
CAS
CSCD
北大核心
1998年第3期267-271,共5页
Chinese Journal of Luminescence
基金
863计划新材料领域资助
关键词
金刚石镶嵌
非晶碳膜
场致电子发射
薄膜
diamond amorphous carbon thin film, field electron emission, negative electron affinit
