摘要
描述了静电振动制靶方法。该法的基本过程是细微粒子在静电场中作振动并在电极上沉积成膜。用静电振动法已制成２０ 多种自支撑靶和有衬底靶，靶的质量厚度范围为１０～１３００ μｇ／ｃｍ ２。靶的均匀性用α测厚仪测量，一般好于９６ ％ 。
A new type deposition method which is based on a vibrational motion of microparticles in electrostatic field between parallel electrodes is described. Self supporting targets and targets on backings with mass thickness between 0.01 and 1.3 mg· cm -2 from 21 different elements have been prepared by the method. The target uniformity measured by the α thickness gauge is better than 96 %.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
1999年第4期346-349,共4页
Atomic Energy Science and Technology
关键词
静电振动
自支撑
均匀性
核靶
薄膜
Electricity vibration Uniformity Self supporting
