摘要
依据材料的质量吸收系数和波长的关系，选择Cr和Al设计和制备30．4nm自支撑滤光片。在制备时以NaCl为脱膜剂，以热蒸发方式蒸镀Al，以电子束蒸发方式蒸镀Cr，制备了30．4nm的Cr／Al／Cr自支撑滤光膜，并对滤光片的表面缺陷进行了分析。通过显微镜观察，滤光膜均匀纯净，无明显针孔。Cr／Al／Cr自支撑滤光片在合肥国家同步辐射实验室进行了测量，Cr／Al／Or厚度为5nm／500nm／5nm和12．5nm／500nm／12．5nm的滤光片在30．4nm波长处的透过率分别为7．6％和4．6％，透过率曲线和理论计算基本一致。用紫外分光光度计测量得滤光片在200-800nm波长范围的透过率小于0．02％，满足使用要求。
Cr and Al were chosen to design the 30.4 nm self-supporting filter based on relation between mass absorption coefficient and wavelength. NaCl was chosen as parting agent, Al was deposited by thermal evaporation, Cr was deposited by electron-beam evaporation, and finally 30.4 nm Cr/Al/Cr self-supporting filters were prepared. Observed under microscope, the filter topography was clean and uniform without apparent pinholes. The Cr/Al/Cr filters were measured in th National Synchrotron Radiation Laboratory in Hefei, and the transmittanees of Cr（5 nm）/Al（500 nm）/Cr （5 nm） filter and Cr（12.5 nm）/Al（500 nm）/Cr （12.5 nm） filter are 7.6% and 4.6% at the wavelength of 30.4 nm, respectively. The measured transmittance curves of the two filters in EUV region are in general accordance with the prediction design. The filter transmittance is less than 0.02% from 200 nm to 800 nm measured with a UV-vis spectrophotometer （UV757CRT）, satisfying the application requirement. Finally the surface defects of a filter were analyzed.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2009年第2期235-239,共5页
High Power Laser and Particle Beams
基金
国家自然科学基金委和中国工程物理研究院联合资助项目(10576021)
关键词
滤光膜
质量吸收系数
自支撑
透过率
缺陷
filter
mass absorption coefficient
self-supporting
transmittanc
defect
