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Be靶制备技术研究 被引量:2

Preparation of Beryllium Foils
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摘要 介绍了Be靶制备的电阻加热法、滚轧法、静电振动法、离心沉淀法、聚集束溅射法等。结果显示 :电阻加热和滚轧制备自支撑Be靶的厚度范围分别为 2 0~ 970 μg/cm2 和 3 8~ 2 0 μm。 The paper introduces the methods for making Be foils including rolling, resistant heating, focused ion beam sputtering, centrifugal precipitation and electricity vibration. Self supporting Be foils of 20~970 μg/cm 2 and 3.8~20 μm have been made by resistant heating and rolling, respectively.
出处 《原子能科学技术》 EI CAS CSCD 2002年第4期399-400,共2页 Atomic Energy Science and Technology
基金 国家"8 63"高技术项目资助课题 (41 6 3 3 8)
关键词 制备技术 自支撑Be靶 聚焦束溅射 滚轧 退火 铍靶 电阻加热 静电振动 离心沉淀 self suporting Be foils focused ion beam sputtering rolling annealing
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