摘要
通过IBAD技术制备了MoS2 +Ag(Cu)复合膜 ,并利用XPS和ESR考察了复合膜的氧化情况。发现在RH为 6 0 %的大气环境下 ,Cu的掺入加速了MoS2 的氧化 ,相反Ag的加入却使MoS2 的氧化受到抑制 ;XPS发现MoS2 +Cu复合膜中存在Mo6 + ,ESR却并没发现中间态Mo5+ ;而XPS没有检测到MoS2 +Ag膜中有Mo6 + ,ESR却发现Mo5+ 。这说明Mo5+
Ag(Cu)/MoS 2 composite thin films were grown by IBAD.The films were studied with XPS and ESR to understand the mechanism of the film oxidation.The results have shown that at the relative humidity of RH=60% in the ambient environment,oxidation was found to be accelerated in Cu doped MoS 2 films,whereas the oxidation was slowed down in Ag doped MoS 2 films.XPS analysis revealed that Mo 6+ only exists in Cu doped MoS 2 films but not instead of Ag doped MoS 2 films.On the other hand,ESR results showed that intermediate state Mo 5+ exists in Ag doped but not in Cu doped MoS 2 films.We suggest that the chemical environments may strongly affect Mo 5+ .
出处
《真空科学与技术》
EI
CAS
CSCD
北大核心
1999年第2期85-88,共4页
Vacuum Science and Technology
基金
兰州化学物理研究所固体润滑开放实验室资助课题
