摘要
利用离子束辅助沉积技术 (IBAD)研究了在互不固溶的Cu -Ta和Cu -Nb系统中获得非晶相和亚稳晶相的可能性 .结果表明 :r(Cu)为 30 %时Cu含量的Cu -Ta薄膜得到了非晶相 ;r(Cu)为 2 5 %～ 35 %时Cu -Nb薄膜中随辅助离子束能量的改变出现了fcc相 -非晶相转变 ;r(Cu)为 2 0 %时Cu -Nb薄膜中得到了bcc相 ,说明IBAD技术可以在互不固溶二元合金系统中制备非晶和亚稳晶相 .
The possibility of formation of amorphous and metastable crystalline phases by ion beam assisted deposition (IBAD) technique in the immiscible Cu-Ta and Cu-Nb systems was investigated in this paper. The experimental results revealed that,the amorphous phase was obtained in the film with the composition of about Cu 30 Ta 70 in the Cu-Ta films; a fcc amorphous transformation accompanying with energy change of ion beam was observed in the Cu-Nb films around the 25 at.%-35 at.% Cu fraction; and the bcc phase was obtained in the Cu 20 Nb 80 films. Therefore, the IBAD technique is able to prepare amorphous and metastable crystalline phases in the immiscible binary metal systems. The formation of amorphous or metastable crystalline phases is induced by the action of the assisting ion beam during the deposition process.
出处
《材料科学与工艺》
EI
CAS
CSCD
2001年第3期277-280,共4页
Materials Science and Technology
基金
国家重大基金资助项目 (G2 0 0 0 0 6 72 0 7)
国家自然科学基金资助项目 ( 19875 0 2 7)
