摘要
采用离子束刻蚀制备线列熔凝石英柱微透镜阵列，准分子激光扫描消融法淀积性能均匀且稳定性良好的ＹＢａ２Ｃｕ３Ｏ７－δ高温超导薄膜，湿法刻蚀制备超导薄膜器件，微透镜阵列与超导薄膜器件用胶粘合构成组合红外探测器，测试了组合器件在１～５ｍ红外波段的光响应特性．
The linear cylinder microlens arrays in fused quartz were fabricated by ion beam etching, the YBa 2Cu 3O 7 δ high Tc superconducting thin film were deposited by excimer laser scanning ablation, and the superconducting thin film detectors were patterned by photolithography method. The hybrid IR detecting device was made by using the special glue to couple the micro optical device. The optical response characteristics of the device fabricated in the region of 1～5μm IR optical spectrum were investigated.
出处
《华中理工大学学报》
CSCD
北大核心
1998年第A02期4-6,12,共4页
Journal of Huazhong University of Science and Technology
关键词
微透镜
红外探测器
Bolometer器件
超导薄膜
microlens array
superconducting IR detector
hybrid structure of microlens and IR detector
