摘要
通过分析现有的基于在高温超导体超导转变温区的热效应及光子效应的薄膜型器件的结构特点和光电特性，讨论了利用单片折射型微透镜进行高温超导薄膜红外探测器光电响应性能改善的可行性，给出了几种典型的可与高温超导薄膜红外探测器耦合的单片面阵硅折射型微透镜阵列的ＳＥＭ 测试结果及主要的几项参数指标。
The structure and opto electronic characteristics of high Tc superconducting thin film detectors are analyzed. The improvement of opto electronic characteristics of high Tc superconductors with refractive microlens is discussed. Several typical refractive microlens obtained by using ion beam etching method, which is coupled with the high Tc superconducting thin film detectors, are given.
出处
《光学技术》
CAS
CSCD
2000年第1期13-15,共3页
Optical Technique
