摘要
利用空间光调制器光强的精确调制作用,把数字微反射镜阵列(DMD)作为灰度图形发生器,经一次曝光及优化显影等后处理过程,可制作出具有连续面形的微光学元件。用上述方法在实验上获得了微透镜阵列,并有较好的连续面形,符合预期效果。研究表明,该方法不仅可快速地实现连续面形微结构的加工,而且大大简化了制作工艺,有助于降低微光学元件的加工成本,适合于微结构的研究性制作或小批量生产,有广泛应用潜力。
One-step fabrication of arbitrarily continuous relief profile of microoptical elements can be realized through a post-processing procedure using DMD as a gray-tone pattern generator with a precise modulation of light. By this method, a microlens array with good profile, as expected, was successfully fabricated. The further analysis shows this method can not only quickly fabricate continuous profile structure but also largely simplify the lithography procedures. The method effectively saves the cost of fabricating microoptical elements and provides the potential application for the fabrication investigation or small volume-production of the elements.
出处
《微细加工技术》
EI
2006年第6期18-21,共4页
Microfabrication Technology
基金
国家自然科学基金资助项目(60376021)
微细加工国家重点实验基金资助项目
关键词
无掩模光刻
数字微反射镜
微透镜
阵列
maskless lithography
digital micromirrors device(DMD)
microlens-array
