摘要
采用双离子束溅射VOx薄膜附加热处理的方式制备纳米VO2薄膜,利用X射线衍射仪和扫描电子显微镜分别对其结晶结构和表面形貌进行了测试,利用傅立叶变换红外光谱仪(FTIR)对热驱动下纳米VO2薄膜相变过程中的光学性能进行测试与分析。实验结果表明,经400℃N2热处理后,获得了由纳米颗粒组成的VO2薄膜;在所测试的红外波段,纳米VO2薄膜内颗粒发生相变的初始温度随波长的增加而升高,薄膜的相变温度点随波长增加也逐渐升高。
Nano-vanadium dioxide（VO2） thin films are prepared by thermal annealing VO2 thin films deposited by dual ion beam sputtering.X-ray diffraction and scanning electronic microscopy were used to measure the crystal structure and investigate the morphology of thin film,respectively.Fourier Transform Infrared spectrum were used to measure and analyze the optical phase transition properties are measured and analyzed by use of fourier transform infrared spectrum.The results show that nano-vanadium dioxide thin films could be obtained by annealing VO2 thin films deposited by dual Ion Beam Sputtering at 400 ℃ in nitrogen atmosphere;the transition temperature and the transition onset temperature of VO2 thin films increase with wavelength increasing in the measuring wave band.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2010年第3期323-327,共5页
Journal of Optoelectronics·Laser
基金
国家“863”计划资助项目(2008AA031401)
国家自然科学基金资助项目(60771019)
天津市应用基础及前沿技术研究重点资助项目(08JCZDJC17500)
关键词
VO2
光学相变
红外透射
nano-VO2 thin film
optical phase transition
infrared transmission
