摘要
以SnC l2.2H2O及无水乙醇为原料,利用溶胶-凝胶法在快速热退火下制备了SnO2纳米薄膜,研究了快速热退火(RTA)对SnO2薄膜性质的影响.采用X射线衍射谱(XRD)、扫描电子显微镜(SEM),研究了薄膜的晶粒尺寸、微结构、表面形貌与快速热退火条件的关联,用傅里叶变换红外光谱(FT-IR)和光致发光研究了薄膜的光学性质.结果表明,快速热退火(RTA)温度对薄膜的光学性质、晶粒尺寸和薄膜的结构形态均有较大的影响.
By using SnCl2 2H2O as main materials and ethanol as solvent, nano-SnO2 thin films were prepared by sol-gel technique with rapid thermal annealing （RTA）. The effect of rapid thermal annealing（RTA） on property of nano-SnO2thin film was explored. The size of grains, the microstructure, the morphology and the optical properties of nano-SnO2 thin films were characterized by XRD, SEM, PL and FT-IR. The results indicate that the optical property and the grain-size, the microstructure, and the morphology of the samples change evidently with different temperature of RTA.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
2008年第2期101-104,共4页
Journal of Infrared and Millimeter Waves
基金
上海市教委科研基金(2006AZ113)
上海市教委优秀青年教师科研专项基金
国家自然科学基金(60677022)
上海重点学科建设项目(B411)资助项目
