摘要
减反膜在现代光学薄膜生产中占有十分重要的地位,其研究依赖于制备工艺。本文结合近几年来国内外研究现状,叙述了几种不同的减反膜制备方法,分析了各种制备方法的工艺特点以及各自的优缺点,如真空蒸镀法、溅射镀法、溶胶-凝胶法等。并提出了相应的改进方法,分析了这些工艺在减反膜制备中的应用前景,为减反膜的制备提供了参考。
Anti-reflective film possesses a very important position in modern optical film production industry. Its research is mostly depending on its technology. In this paper, the research progress in anti-reflective film preparation technology is summarized. The merits and drawbacks of these preparation methods, such as vacuum evaporation, sputtering and sol-gel, have been analyzed and compared. The application prospects for anti-reflective film preparation technology are also analyzed, providing a good reference for anti-reflective film preparation.
出处
《真空电子技术》
2009年第3期23-29,共7页
Vacuum Electronics
关键词
减反膜
制备工艺
反射率
透射率
Anti-reflective film
Preparation technology
Reflectance
Transmission
