摘要
着重介绍采用一段真空波导耦合的ECR微波等离子体装置，以及在CH4－H2混合气体放电情况下，诊断了内部等离子体参数，给出了等离子体密度、电子温度、基板鞘附近的空间电位以及在类金刚石膜合成条件下等离子体中的基团情况，同时研究了它们与工艺参数之间的关系。
The ECR microwave PCVD device with a vacuum waveguide connected was discussed. The plas-ma characteristics were experimentally studied with Langmuir probe, emission probe and ootical emission spec-troscopy,in the case of the CH4-H2 mixture discharging. The results showed that the radial distribution of the plasma density is neary uniform when ECR is positioned near the CVD chamber, and that the substrate sheath potential increases with an increasing negative bias voltage of the substrate. The contamination of the microwave pressure window can be effectively eliminated with the incorporation of a vacuum waveguide.
出处
《真空科学与技术》
CSCD
北大核心
1998年第5期390-394,共5页
Vacuum Science and Technology
基金
国家自然科学基金!69493500
关键词
电子回旋共振
等离子体诊断
微波
波导
Electron cyclotron resonance,Plasma diagnosis, Microwave,Waveguide
