摘要
为了提高TbDy-Fe膜的低场磁敏性,采用离子束溅射沉积(IBSD)法制备TbDy-Fe超磁致伸缩薄膜,分别研究了纯Fe膜与TbDy-Fe单层膜、TbDy-Fe/Fe耦合多层膜的复合及磁场下溅射沉积对TbDy-Fe膜磁致伸缩性能的影响;用振动样品磁强计(VSM)测试薄膜磁滞回线,用电容位移测量仪测试薄膜悬臂梁自由端偏转量,并计算出磁致伸缩系数λ。结果表明,由IBSD法制备的纯Fe膜、TbDy-Fe单层膜、TbDy-Fe/Fe复合膜的易磁化轴均平行于膜面,TbDy-Fe/Fe复合膜在低场下的磁化强度与磁导率均高于TbDy-Fe单层膜(在100 kA/m时,TbDy-Fe/Fe复合膜的磁化强度比TbDy-Fe单层膜高173%)。纯Fe膜分别与TbDy-Fe单层膜、TbDy-Fe/Fe耦合多层膜进行复合均可提高薄膜磁致伸缩性能;磁场下溅射沉积所得180 nm纯Fe膜+640 nmTbDy-Fe/Fe耦合多层膜,由于在其膜面内短轴方向产生感生磁各向异性,从而使磁致伸缩性能得到进一步的提高,在150 kA/m的磁场下它的λ值可达到650×10-6。
To promote the magnetostrictive sensibility of TbDy-Fe films at low magnetic field, TbDy-Fe giant mgnetostrictive films was fabricated by ion beam sputtering deposition（IBSD）. The effects of composite of Fe film with TbDy-Fe single-layer film as well as withTbDy-Fe/Fe coupling multilayer and field-sputtering on their magnetostriction were investigated respectively. Magnetic hysteresis loops were measured by using a vibrating sample magnetometer. Deflection of the film cantilever free end was measured by capacitance-displacement micrometer,and then magnetostriction coefficient λ was calculated. The results showed that the easy axis of the films including Fe film, TbDy-Fe single-layer and TbDy-Fe/Fe composite films fabricated by IBSD was parallel to the film plane. At low magnetic field, the magnetization and permeability of TbDy-Fe/Fe composite film were higher than TbDy-Fe single-layer film（The magnetization of TbDy-Fe/Fe composite film was 173% larger than which of TbDy-Fe single-layer film at 100 kA/m）. The composite of Fe film with TbDy-Fe single-layer film as well as with TbDy-Fe/Fe coupling muhilayers promoted the magnetostriction of the films. Fe film（ 180 nm） ＋ TbDy-Fe/Fe coupling muhilayer（640 nm）was fabricated during field-sputtering. In this case, induced magnetic anisotropy was formed in the short axis direction of the film plane, so that magnetostriction was further promoted and its value of 2 reached to 650 × 10^-6 at 150 kA/m.
出处
《微细加工技术》
2008年第3期30-34,59,共6页
Microfabrication Technology
基金
福建省科技厅高新技术与火炬计划资助项目(99-H-44)
福州大学开放测试基金资助项目(06-07)
福建省科技厅资助高校项目(2007F5065)
