摘要
采用IBS法在锡青铜衬底上溅射沉积Sm-Fe非晶态超磁致伸缩薄膜,研究衬底的表面状态和薄膜热处理对Sm-Fe薄膜磁致伸缩性能的影响。实验结果表明,锡青铜衬底状态对Sm-Fe超磁致伸缩薄膜磁伸性能有很大影响。样品经过200℃真空热处理后,100 mT内dλ/dH值从制备态Sm-Fe薄膜的0.71×10-3T-1提高到2.48×10-3T-1,薄膜低场磁敏性得到显著提高。
Amorphous Sm-Fe giant magnetostriction films were prepared on QSn bronze substrate by ion beam sputtering. The effect of substrate and annealing on the magnetostricion of Sm-Fe GMFs was studied. Results show that the state of substrate has significant effects on the the magnetostricion of Sm-Fe GMFs; that the dA/dH value of deposited Sm-Fe film was increased from 0.71 × 10^-3T^-1 to 2.48 × 10^-3T^-1, after being annealed at the temperature of 200℃ ; that the magnetically suscep- tible property of the Sm-Fe thin films is significantly improved in the low magnetic fields.
出处
《福建工程学院学报》
CAS
2007年第1期39-41,49,共4页
Journal of Fujian University of Technology
基金
福建省科技厅高新技术与火炬计划项目(99-H-44)
福州大学开放测试基金(2005035)
