摘要
微型机械运动参数的测试是微型机械研究工作的基础。本文介绍微型机械运动参数测试仪的工作原理和关键技术，并对仪器的精度进行了分析。
It is important to measure dynamics of micromechanism in its research work. In this paper,the work principle and key technique of the instrument for measuring dynamics of micromechnism are presented and the mesurement accuracy is analysed.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第2期48-52,共5页
Optics and Precision Engineering
