摘要
随着微电子机械系统(MEMS,MicroElectroMechanicalSystem)研究的深入和产业化的需求,其检测在MEMS中的重要性越来越大。光学检测方法以其非接触、快速、高精度等优点得到了大量的应用。分析和介绍了国内外采用光学检测法进行MEMS检测的方法及相关检测仪器在测量中的应用。尤其是Nanosurf测量仪器,它是一种独立的三维非接触测量系统,扫描共焦显微镜是基于白光共焦技术,强大且友好的软件控制使所需获得的数据不仅速度快,而且精度很高,并且提供了多种不同的表面分析方法。
Along with the deep research of MEMS and the need of industrialization, the importance of testing in MEMS research is increasing. Optic testing methods have many merits such as noncontact, quickness, high precision. Applications of optic testing methods for MEMS testing at home and abroad are surveyed and described, and readymade instruments are introduced.
出处
《光学技术》
CAS
CSCD
2003年第2期197-200,共4页
Optical Technique
