摘要
近年来,真空成膜技术及其薄膜产品已广泛应用于各个领域,本文介绍了几种镀膜技术和产品的发展情况,同时给出了某些评价。
Recently many kinds of the thin film products have been widely applied in many fields. In this paper, the development state of thin film technology has been presented and the author has made some comments.
出处
《真空》
CAS
北大核心
1997年第6期1-4,共4页
Vacuum