摘要
本文探讨了近期内可能成为我国薄膜产业化新的增长点的薄膜产品；讨论了大面积连续镀膜的均匀性、缺陷以及对镀膜设备的要求；
Thin film products which will become new growth points of thin film industrialization in our country in the near future are discussed. The uniformity, defects and demands on coating equipments for large area continuous coating are analysed. Some suggestions on the problems which should be resolved in the progress of thin film industrialization in our country are presented.
出处
《真空》
CAS
北大核心
1997年第1期1-5,共5页
Vacuum
