摘要
采用溶胶-凝胶法Li、Mg双组分掺杂制备ZnO薄膜。利用XRD、AFM、Hall测试仪、分光光度仪等对薄膜结构和电学光学性能表征与分析，探讨了Li、Mg双组分掺杂离子、掺杂比例对ZnO薄膜晶体生长和光、电性能的影响。研究表明Li、Mg双组分掺杂提高了ZnO薄膜的电阻率；在可见光范围仍具有较好的透光性能，双组分掺杂ZnO薄膜因为Mg的掺入而具备了Zn1-x-yMgxO薄膜的相关光学特性，吸收峰具有蓝移现象，禁带宽度变大；结晶性能变差，晶粒变小，c轴的取向性变差。
The series of Li, Mg doped ZnO thin films were prepared by sol-gel method on the glass substrates. According to the testing results of the structure, electric and optical properties of ZnO films by XRD, AFM, Hall testing device, UV-visible spectrum etc., the paper discussed the effects of the Li^＋Mg^2＋ ions and their doping propertion in ZnO thin films on the structure and basic properties of ZnO thin films. The result show as following： （ 1 ） the optical and electrical functions of Li^＋,Mg^2＋ doped ZnO thin films were enhanced markedly. The electrical resistivity of thin film increased, the visible optical transparence rate of Li＋,Mg2＋ doped ZnO thin films kept well. （2） Due to Mg-doping in ZnO film, Some optical characteristics of Zn1-x-yMgxO thin films were attained in （Li, Mg）-doped ZnO thin films, for example, the absorption peak of the visible light spectrum of the ZnO film shifted to the blue band and the width of energy gap in ZnO crystal increased, and （3） The crystal features of （Li, Mg）-doped ZnO thin film changed, its crystal grain size, for example, changed smaller, crystallization degree decreased and the direction orientation of c axis became uncertain.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第A10期4070-4074,共5页
Journal of Functional Materials
基金
致谢：感谢湖北省铁电压电材料重点实验室开放基金的资助.
