摘要
本文首先扼要介绍了ZnO的晶体结构以及作为压电、压敏、发光、透明导电薄膜的用途。还介绍了两种溅射方法制备ZnO薄膜。研究了ZnO薄膜的气敏性,发现经适当处理后仅对丙酮有择优气敏性。
The crystal structure of ZnO and its application in piezoelectric, voltage-sensing, luminous materials and conductive transparent film are introduced. The preparation of ZnO film using two methods of spattering is also presented. After the gas sensing properties of ZnO was studied. It was discovering that the treated ZnO has a selected sensing to acetone vapour.
出处
《传感器世界》
2005年第12期10-17,共8页
Sensor World
关键词
气敏传感器
溅射
丙酮
gas sensing transducer
spattering
acetone
