摘要
研究了金刚石薄膜的厚度、表面粗糙度及其成分对金刚石薄膜光学透过率的影响,采用AFM观察金刚石膜的表面形貌并测试其表面粗糙度Ra值;用XPS仪测试了金刚石膜成分;用UV-365分光光度仪测试了光学透过率.结果表明:表面粗糙度是影响金刚石薄膜光学透过率的重要因素,其降低一倍,光学透过率增加两倍多.要提高金刚石薄膜的光学透过率,应大力降低表面粗糙度.
The effects of thickness, surface roughness and composition of optical transparency of diamond film are studied here. AFM is used to observe the surface shape and determine the value of surface roughness; XPS is used to determine the composition of each diamond film; UV-365 light spectrum detector is used to determine optical transparency. The results show that surface roughness is the most important factor, and when it decreased by once, the optical transparency increases by two times. Thus, the surface roughness should be decreased as far as possible to obtain high optical transparency.
出处
《西南民族大学学报（自然科学版）》
CAS
2003年第5期548-550,共3页
Journal of Southwest Minzu University(Natural Science Edition)
基金
国家自然科学基金资助课题(69876026).
