摘要
从ＰＩＮ波导探测器性能参数的定义出发，阐述了各参数之间的内在联系，说明量子效率与带宽、灵敏度等物理量之间的矛盾现象。通过对具体结构及参数的分析比较，说明结构与参数之间的影响方式以及ＧｅｘＳｉ１－ｘ／Ｓｉ超晶格波导探测器的特有性质。
According to the definition of the performance parameters of PIN waveguide detector,the interrelations of these parameters are described,and the contradictions between a quantum efficiency and a bandwidth,sensivity,etc are explained.An influence of the structure on the parameters and the inherent properties of Ge x Si 1- x /Si superlattice waveguide detectors are mentioned through analysing and comparing practical structures and parameters.And the advantage of the waveguide detectors is further demonstrated.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
1996年第3期238-242,共5页
Semiconductor Optoelectronics
关键词
半导体器件
波导
光电探测器
量子效率
Semiconductor Devices,Waveguide,Photodetectors,Quantum Efficiency,Bandwidth
