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Si_(1-x-y)Ge_xC_y合金材料物理特性研究进展 被引量：2

Research Progress in Physical Characteristics of Si_(1-x-y)Ge_xC_y Alloy
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摘要 碳的加入为Si-Ge系统在能带和应变工程上提供了更大的灵活性。文章对Si1-x-yGexCy合金材料物理特性的研究现状进行了概述,重点分析了替位式碳原子在Si1-xGex合金应变补偿和能带工程中的作用,并对其行为机理进行了分析和总结。 The incorporation of carbon into Si1-x-y Gex system allows more freedom in band gap and strain engineering. Present status of research in the physical characteristics of Si1-x-y GexCy alloy is discussed. Effects of substitutional carbon on strain compensation and band structure are analyzed in particular, and their mechanisms are summarized.
作者 高勇 刘静 马丽
机构地区 西安理工大学电子工程系
出处 《微电子学》 CAS CSCD 北大核心 2005年第5期527-530,533,共5页 Microelectronics
基金 国家自然科学基金资助项目(50477012)
关键词 Si1-x-yGexCy合金 应变补偿 能带工程 替位式碳原子 Si1-x-yGexCy alloy Strain compensation Band engineering Substitutional carbon
分类号 TN304.24 [电子电信—物理电子学]
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参考文献21

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共引文献12

同被引文献43

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引证文献2

二级引证文献12

微电子学
2005年 第5期

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