摘要
本文介绍用表面微机械加工技术制成的多晶硅桥形温敏电阻及其在流速传感器中的应用。“桥体”和“桥墩”材料分别为多晶硅和二氧化硅。流速传感器的实验结果表明,在流速为10cm/s下输出可达380mV。
A polysilicon bridge thermistor has been fabricated, in which poly-Si strip constructs the'bridge body', silicon dioxide serves as 'bridge pier' supporting the bridge at the two ends.The thermistor has been successfully used in the flow velocity sensor.The experiments showthe poly-Si thermistor has a TCR of-1200 ppm/℃ (at 20℃), the flow sensor has a sensitivityof 38 mV(at 10cm/s).
基金
国家自然科学基金
国家教委博士基金
关键词
流速传感器
多晶硅
桥形结构
Micromachining
Sensors
Thermistors
Velocity measurement
