摘要
提出了一种新型集成扩展电阻硅流量（ＳＲＳＦ）传感器。此结构的工作原理是基于热传导原理，即当流体流过加热芯片时，芯片两端的温差可以用于测量流体的速度。由于应用硅扩展电阻作温度敏感元，故ＳＲＳＦ传感器适用于测量温度较高的流体。理论分析和实验研究结果表明，ＳＲＳＦ传感器具有如下特点：小流量时（ｖ０＜１ｍ／ｓ）灵敏度较高；有方向敏特性；与标准ＩＣ工艺兼容，可制成集成化流量传感器。
A novel integrated spreading resistance silicon flow (SRSF) sensor is presented. Its operation is based on the heat transfer principle: when a fluid is passing over a heated chip, the temperature differences on the chip are a measure for the flow velocity. By using the technique of SR as temperature sensing element, the SRSF sensor can be used in flow of an appropriate higher temperature. Theoretical analysis and experimental research show that this SRSF sensor has high sensitivity under small flow rate (v0 ＜ 1m/s ).direction-sensitive character and can be made integrated flow sensor by standard IC technology.
出处
《华南理工大学学报（自然科学版）》
EI
CAS
CSCD
1995年第12期18-22,共5页
Journal of South China University of Technology(Natural Science Edition)
基金
国家自然科学基金
广东省自然科学基金
