摘要
本文报导了悬桥式微流量传感器的制作以及特性测试，这种传感器采用硅微机械加工技术在硅片上制作微悬桥，微悬桥由二氧化硅、ＬＰＣＶＤ多晶硅、ＬＰＣＶＤ氮化硅三明治结构材料组成。该传感器可测量０．０１～１００ＳＣＣＭ的气体流量，其响应时间小于１０ｍｓ，芯片尺寸为７×６ｍｍ２。
We report the fabrication and measurement of a microbridge flow sensor.It is produced using silicon micromechanicaI technology.The bridges which composed of sandwiched materials are suspended over channels etched in silicon.The sensor can measure a gas flow ranging from 0.0 1 SCCM to 100 SCCM. The response time of sensor has been measured to be less than 10ms. The overall dimensions of the sensor chip are 7mm×6mm×0.7mm.
出处
《功能材料与器件学报》
CAS
CSCD
1996年第3期194-199,共6页
Journal of Functional Materials and Devices
基金
机械工业部"八五"科技攻关项目
国家自然科学基金
