摘要
把压电型精密驱动器按技术特点分为直动式、步进式/蠕动式和惯性式三类,列举了各类中的国内外典型机构,分析各类驱动机构的工作原理、优势、缺点、适用场合及研究的活跃点,对进一步研究多自由度精密位移驱动器具有指导意义。
The piezo precision actuator can be classed with three sorts according to their characters: direct drive type,steps drive type/inchworm type,impact drive type. In order to do further research on the multi-degrees of freedom actuators, some typical mechanisms are particularized. Their characters are introduced at the same time, which contains such as working principle,merits, defects, used situations, studying focus etc.
出处
《压电与声光》
CAS
CSCD
北大核心
2004年第3期192-195,共4页
Piezoelectrics & Acoustooptics
基金
国家"八六三"计划资助项目(2002AA423150)
关键词
压电陶瓷驱动器
精密驱动
自由度
驱动原理
piezoelectric actuator
precision drive
degrees of freedom
drive principle
