摘要
柔性铰链精密定位工作台具有直接传动、无摩擦、结构紧凑、重量轻、刚度好及分辨率高等优点。设计了一种具有较大传动比的定位工作台 ,介绍了其系统结构和工作原理 ,并对刚度性能作了分析。利用双频激光干涉仪对压电陶瓷驱动下的工作台特性进行了测量。结果表明 ,该工作台具有纳米级的分辨率和定位精度。
The precision positioning stage utilizing flexure hinges takes the numerous advantages of direct transmission, no friction, no backlash, compactness, satisfactory stiffness and high resolution. This paper develops a novel positioning stage with large transmission ratio, introduces the system structure and basic principle, analyzes its performance of stiffness. A dual-frequency interferometer is employed to evaluate the feature of the stage driven by piezoelectric ceramic(PZT). The experimental results show that the stage has the resolution and positioning accuracy of nanometer order.
出处
《光学技术》
CAS
CSCD
2001年第6期556-557,559,共3页
Optical Technique
基金
国家自然科学基金资助项目 (598750 51 )
关键词
柔性铰链
定位工作台
纳米级分辨率
压电陶瓷
双频激光干涉仪
flexure hinges
positioning stage
nanometer resolution
piezoelectric ceramic
dual-frequency interferometer
