摘要
研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元的新型惯性冲击式旋转精密驱动器。对自由端带有集中质量的悬臂式压电双晶片的动态特性进行了有限元法和实验分析,提出了压电双晶片型惯性冲击式精密驱动器特定的定频调压驱动方法。对压电双晶片型惯性冲击式旋转精密驱动器进行了性能测试,驱动器旋转行程为180°、旋转步长分辨力为1μrad、最大转速为0.2rad/min、最大扭矩为0.02Nm。该驱动器结构简单,特别是成本为传统惯性冲击式驱动器的1/100左右。
An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorph, a certain method of fixed-frequency and adjustable-amplitude are confirmed to control the actuator. The results show that the actuator excited by fixed-frequency and adjustable-amplitude ramp voltage waveform work with large travel range (180°), high resolution (1 μrad) and speed (0.2 rad/min) and heavy-load ability (0.02 Nm). Having the advantages of high-precision positioning ability, simple structure and only one percent cost of traditional impact drive mechanism, it is expected that the proposed actuator will be widely applied to precision industry.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第3期298-304,共7页
Optics and Precision Engineering
基金
国家高技术研究发展计划资助项目(No.2002AA423150)
国家自然科学基金资助项目(No.50475010)
关键词
惯性冲击
压电双晶片
悬臂
有限元分析
Finite element method
Mechanical drives
Piezoelectric devices
