摘要
采用电磁与压电相结合的方式给出了一种直线驱动器,详细介绍了该驱动器的结构与工作原理,并对其牵引力进行了估算与分析;比较了几种典型的驱动器控制信号波形,并选择一种较为合理的波形进行了驱动器性能试验,试验结果表明该驱动器能够可靠地实现双向运动,具有行程大,精度高,易于控制等特点,可用于微定位、微驱动等领域。
A new linear actuator is introduced based on electromagnetism and piezoelectricity principle in this paper. The structure and locomotion mechanism of this actuator are described in detail, and the traction ability of it is analyzed. Three different kinds of control signal are compared deeply. Some actuating characteristic experiments have been done in this paper, and the experimental results show that this actuator can provide stable stepping movement, large displacement,high positioning accuracy, and can be used in micro electro mechanical systems.
出处
《压电与声光》
CSCD
北大核心
2005年第3期232-234,239,共4页
Piezoelectrics & Acoustooptics
基金
国家"八六三"高技术计划资助项目(2001AA422210)
